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[Industrialization Company Dynamics] Huahai Qingke's First 12-inch Ultra-Precision Wafer Thinning Machine Delivered
Huahai Qingke New Products
Twelve Inch Ultra Precision Wafer Thinning Machine Versatile-GP300
As one of the core enterprises in China's integrated circuit equipment industry, Huahai Qingke Co., Ltd. successfully launched a 12-inch ultra-precision wafer thinning machine Versatile-GP300 with independent intellectual property rights, which was sent to a customer's large production line on September 27.
This equipment can meet the requirements of ultra-precision wafer thinning process for 3D IC manufacturing, advanced packaging and other processes. It can provide a variety of functional configurations such as ultra-precision grinding, polishing, and post-cleaning. It has the advantages of high rigidity, high precision, and flexible process development. The main technical indicators have reached the international advanced level, filling the gap in ultra-precision thinning technology in the field of integrated circuit 3D IC manufacturing and advanced packaging.
The process used by the Versatile-GP300 is very clever. At the beginning of the design, the team innovatively integrated the high-efficiency thinning and polishing process, which can not only realize ultra-flat thinning and surface damage control, but also take into account high efficiency and comprehensive cost performance, and better match the urgent needs of 3D IC wafer thinning market.
In China's 3D IC manufacturing, advanced packaging and other fields, 12-inch high-precision wafer thinning machine all rely on imports. Today, Huahai Qingke's first 12-inch ultra-precision wafer thinning machine has Versatile-GP300 completed in-factory testing and entered the customer's production line for verification. This is Huahai Qingke another product in the realization of domestic semiconductor equipment independent control on the road an important breakthrough.
"If you don't forget, there will be an echo". On the road of independent research and development, Huahai Qingke team has always adhered to the original intention, as always, with the attitude of excellence, constantly pursuing technological breakthroughs, constantly enriching the product series, and contributing to accelerating the process of replacing domestic integrated circuit equipment and better serving the society.
Reprint | Huahai Qingke
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Tianjin High-end Equipment Research Institute, Tsinghua University, Copyright
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