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The project "Particle Behavior and Mechanism of Friction Process" completed by Academician Luo Jianbin of the Department of Mechanical Engineering of Tsinghua University won the second prize of the National Natural Science Award
On January 8, the 2018 National Science and Technology Awards Conference was grandly held in Beijing. The project "Particle Behavior and Mechanism of Friction Process" completed by Academician Luo Jianbin of the Department of Mechanical Engineering of Tsinghua University won the second prize of the National Natural Science Award.
Particles are ubiquitous in friction-related processes, and their behavior and characteristics often determine the laws of friction and surface damage. Especially in chemical mechanical polishing, which is a typical tribological process in the manufacture of integrated circuits, the behavior control of particles is essential to obtain a near-zero damage surface. The main findings of the project are as follows:
(1) The observation of the motion state of nanoparticles and the measurement of flow velocity distribution are realized, the Marangoni flow is directly observed in the evaporating water droplets for the first time, and a new flow criterion is proposed, which is applied to wafer cleaning and drying, which greatly reduces the number of residual particles on the wafer surface, far better than the control index of the production line;
(2) Revealing the mechanism of interaction between nanoparticles in liquid and solid surface, proposing the mechanism of atomic removal of materials, and preparing wafers based on ultra-smooth surfaces (Ra 0.05 nm);
(3) It is found that the thickening effect and anti-friction and anti-wear mechanism of nano-particles in lubricating oil can effectively improve the carrying capacity of lubricating oil film and reduce the friction coefficient by 75%. The material is strengthened by the inhibition of nano-particles on defect growth.
Figure 1. Discovery and flow criterion of Marangoni circulation flow in evaporating water droplets
Figure 2. Monocrystalline silicon surface with surface roughness of 0.05nm
Figure 3. The friction coefficient of diamond particles added to lubricating oil is reduced by 75%
These innovations provide new observation methods and theories for the development of nano-tribology, provide theoretical basis and technical support for applications such as micro-nano manufacturing, and have been applied to ultra-smooth polishing and post-cleaning processes such as computer hard disks and integrated circuit wafers.
The eight representative works of the above work were cited 640 times by him, and were cited and positively evaluated by famous scholars. Relevant research has been supported by the first 973 project in the field of machinery. The five completions of the project have been funded by the Innovation Group Project of the Fund Committee for three consecutive times, and have won academic titles such as academician, Changjiang River, Jieqing and Youqing respectively, which has effectively promoted the development of friction discipline.
Source Event Tsinghua Achievements and Intellectual Property Official WeChat
Contribution | Luo Jianbin Team, Department of Mechanical Engineering, Tsinghua University
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