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Xi Bao | Professor Lu Xinchun's team project in the Department of Mechanical Engineering of Tsinghua University won the first prize of the National Technological Invention Award
The Central Committee of the Communist Party of China and the State Council held a grand national science and technology award conference in Beijing on the morning of June 24.
The project of "Key Technology and Equipment for Chemical Mechanical Polishing of Integrated Circuits" by Lu Xinchun Team of Mechanical Department of Tsinghua University won the first prize of the 2023 National Technology Invention Award.
The National Science and Technology Award is to reward individuals and organizations that have made outstanding contributions in scientific and technological progress activities, mobilize the enthusiasm and creativity of scientific and technological workers, and build an innovative country and a world scientific and technological power. It is established in accordance with the the People's Republic of China Science and Technology Progress Law Awards. The awards include the National Highest Science and Technology Award, the National Natural Science Award, the National Technological Invention Award, the National Science and Technology Progress Award, and the the People's Republic of China International Science and Technology Cooperation Award.
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